| Range of Temperature Control |
RT+10 to 200℃ |
| Vacuum Degree |
<133Pa |
| Temperature Fluctuation |
±1% |
| Tray |
1 |
| Range of Temperature Control |
RT+10 to 200℃ |
| Vacuum Degree |
<133Pa |
| Temperature Fluctuation |
±1% |
| Tray |
1 |
| Range of Temperature Control |
RT+10 to 200℃ |
| Vacuum Degree |
<133Pa |
| Temperature Fluctuation |
±1% |
| Tray |
2 |
| Range of Temperature Control |
RT+10 to 200℃ |
| Vacuum Degree |
<133Pa |
| Temperature Fluctuation |
±1% |
| Tray |
2 |
| Range of Temperature Control |
RT+10 to 200℃ |
| Vacuum Degree |
<133Pa |
| Temperature Fluctuation |
±1% |
| Tray |
2 |
| Range of Temperature Control |
RT+10 to 200℃ |
| Vacuum Degree |
<133Pa |
| Temperature Fluctuation |
±1% |
| Tray |
3 |